About
InnerSense is the developer of the InnerSense SmartWafer (SMW2) system, a fully automated solution that enables predictive and planned maintenance as well as proper tool recovery to minimize tool downtime and overall cost. The SMW2 uses high-resolution accelerometers to detect and record every motion and impact of the wafer. With the increased data collection, the SMW2 becomes a leading indicator and therefore a predictive monitor for both handler preventative maintenance and mechanical defects. Using the SMW2 system and associated software, engineers can understand exactly what the wafer feels as it travels inside the process tool. The InnerSense solution is a fully automated system, incorporating a SmartFOUP, automated docking station, and remote database along with automatic data analysis. The ease of use due to automation results in increased utilization of the system with minimal engineering and equipment downtime, and subsequently to increased detection and prevention of handling issues, including events that can lead to wafer damage and thermal breaks.